µsurf sensor

Area surface sensor for integration into production machines

The confocal probe is the centerpiece of NanoFocus µsurf measurement technology. As a discrete unit it can be integrated in production machines and analysis systems and therefore ensures compliance with the dimensional tolerance and quality of your products.

Software interfaces in the form of software development kits enable the complete integration in a higher-level software solution. Take profit from our technological expertise and our many years of experience.

New compact sensor for maximum flexibility in production control

The newly developed compact sensor based on the robust NanoFocus µsurf technology was optimized for use with a robot arm. Small size, high mobility and applicability in all mounting positions were emphases during development. Thanks to cables suitable for drag chains and with a total length of up to 15 m (49 feet), the surface measurement system has a uniquely large operating radius when attached to a robot. The new compact measurement head is ideally suited for fully automated production control.

The μsurf compact sensor can also be applied in stationary use. With a length of only 37 cm (14.6 inches) and a weight of 3.5 kg (7.7 lbs) the system can easily be integrated into various measuring set-ups. It has all the properties of the patented and industry-proven μsurf sensor technology of NanoFocus such as high measurement speed, great precision and applicability on nearly all surfaces.

Examples of application

Machining traces

The surface quality achieved on the workpiece with tools can be captured with µsurf technology. The 3D topology provides information on the surface quality attained, as well as the service life of the tool, and also allows for a direction-independent analysis. Read more about the application


Microlenses can be measured three-dimensionally and non-destructively at various stages of the production process using µsurf technology. Read more about the application

Benefits at a glance

  • Non-contact measurements
  • Universally applicable
  • Determination of steep edges
  • High resolution
  • Reliable results on surfaces with low or different reflection

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