3D line sensor

µscan custom

Line sensor for fast 3D areal measurements

The μscan custom distinguishes itself with outstandingly fast and three-dimensional large area scanning - with highest dynamics and measurement precision.

Profile data can be precisely acquired on almost any surface, independent of varying reflection properties or slopes.

μscan custom measures topographies from the mm to the μm range. The very fast measurement speed allows for high throughput rates.

Examples of application

3D line sensors are suitable for application in various sectors of industry and Research ranging from automotive, microsystem, electronics and semiconductor to medical technology and others.

Automotive: decor, interior
Measurement parameters: surface roughness according to ISO 25178, bearing surfaces, isotropy

Energy: batteries, fuel cells
Measurement parameters: geometry, volume

Electronics: chips, circuit boards
Measurement parameters: co-planarity, fl atness, layer thickness

Benefits at a glance

  • Large area 3D measurements
  • Very high measurement speed
  • Excellent dynamics and precision
  • Measurement of layer thickness and transparent materials
  • Non-contact and non-destructive data acquisition
  • Automatable
  • Robust and reliable

Typical measurement tasks:

  • Geometry (2D, 3D)
  • Roughness according to ISO
  • Layer thickness, flatness, co-planarity
  • Tribology



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