confocal microscope usurf expert

µsurf expert

A new standard in optical 3D surface inspection

The new confocal 3D microscope μsurf expert is optimized for use in testing and development laboratories and fulfills the highest requirements in the field of non-contact surface metrology. The latest product development in the µsurf series by NanoFocus is the result of 20 years of know-how in confocal technology.

µsurf expert sets a new standard in the field of non-contact surface metrology with its high resolution sensors, linear encoders on all axes (x,y,z) and flexible automation options. The confocal microscope offers a high level of operating comfort due to manual z-axis positioning and an ergonomic design.

The option of having user-independent and fully-automatic measurements enables the uncomplicated use of the measurement system in quality assurance.

Several options for automation included

For automatic measurement and analysis of samples through to programmed series measuring of thousands of individual measurements, NanoFocus offers high-performance databased software which permits flexible programming of measurement and evaluation strategies.

HDR function

The HDR function (High Dynamic Range) ensures an optimized visual representation of the measured surface. Height information can be captured in 65536 grayscales (16 bit). This means that over- and underexposure is minimized and finest contrast gradation can be detected. Surface structures with steep flanks and complex geometries can be measured with highest precision and free of artifacts.

4 megapixel camera

The optionally available 4 megapixel camera offers additional resolution capability which is particularly useful for the analysis of finest lateral surface structures. A significantly higher number of measuring points (2,048x2,048) improves the analysis, not only near the diffraction limit but it is also very helpful usingsmall magnifications. Thanks to the patented μsurf technology the measuring speed remains constantly high even when using the 4 megapixel camera.

Color HDR camera

By using an optional color camera further information about the color image of a surface can be acquired. The color information may be overlaid with the 3D topography and provides a realistic three-dimensional impression of the surface.

Benefits at a glance

  • High-end laboratory confocal microscope for R&D and quality assurance
  • High measurement speed
  • Automatable
  • Collision detection
  • Maximum optical Resolution
  • Compact set-up

Contact us online

Call-back service                
System demonstration 
Free test measurement 

Request information

Price quote



Your contact
Julian Pluhatsch
Phone:  +49 208 62000-62
Fax:  +49 208 62000-99

User login

Enter your username and password here in order to log in on the website:

Forgot your password?