Company history

2016NanoFocus AG launches the new measuring system µsprint hp-opc 3000 for the optical inspection of probe cards in wafer production.  
2015Breitmeier Messtechnik GmbH becomes subsidiary of NanoFocus AG.
2014A further milestone in optical surface metrology: introduction of the new µsurf expert - faster, fully automatable and more powerful.

NanoFocus is honored as TOP Innovator 2014 by TOP 100.
2013Entrance to fully automated measurement systems for fast and highly precise quality assurance in the semiconductor industry.

NanoFocus Pte. Ltd. (Asia) founded.


µsurf custom wins MEDTEC EMDT Innovations Award for contribution to innovations in medical technology.

Third generation of µsurf cylinder is succesfully accepted by the international market and is widely used by renowned premium car manufacturers.


Introduction of new software platform μsoft metrology for system control: faster and more intuitive. The new software, compatible to Windows7-64bit, allows for the integration of several sensor in one measurement setup. 

The business solution µsurf solar receives Intersolar-Award 2011


The μsurf-technology is constructed and introduced as allround-laboratory solution μsurf basic. μsurf basic excels by its compact revolver measurement head and the possibility of color measurements


µsurf explorer receives reddot Award

Take over from Siemens AG of the world's fastest confocal sensor for measurement tasks in the production line and integration as µsprint into the NanoFocus product spectrum.


Exclusive distribution and cooperation agreement with Werth Messtechnik GmbH


International launch of the ‘μsurf explorer’ standard product

Sales agreements with IMSTec GmbH (medical technology) and
Graphische Technik und Handel Heimann GmbH (printing industry)

New standard automation software µsoft automation


Growth phase initiated: First significant increase in sales +46%

Move to new premises at Lindnerstrasse 98 in Oberhausen


NanoFocus Inc. Richmond/USA founded

Publicly listed with Entry Standard qualification in the Open Market segment of the German Stock Exchange


Winner of “Zukunftswettbewerb Ruhrgebiet” award (future competition award for the Ruhr region of Germany)

Competence centre surface measurement technology founded


Launch of second µsurf-generation. Product portfoilio expanded with the portable system µsurf mobile and the first NanoFocus business solution for engine cylinder inspection system µsurf cylinder


Market segmentation and global distribution

New company headquarters: Oberhausen


Integration of OM Engineering GmbH into NanoFocus GmbH and change of legal form into NanoFocus AG


Launch of NanoFocus µsurf and OM µscan products


Market launch of first NanoFocus µsurf-generation - the first industrially applicable confocal microscope for the analysis of technical surfaces


OM Engineering Optoelektronische Messtechnik GmbH

Application development of contactless 3D laser profilometry


Basic research and development of high-resolution optical 3D microscopy such as phase microscopy, confocal white light microscopy and 3D analysis software


NanoFocus Messtechnik GmbH founded in Duisburg



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NanoFocus AG
Phone:  0208 – 62 000-0
Fax:  0208 – 62 000-99

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